IN SflU GROWTH OF SUPERCONDUCHNG YBaCuO USING REACTIVE ELECTRON-BEAM COEVAPORATJONt
نویسندگان
چکیده
Conditions required for in sirn growth of YBaCuO thin films by reactive electron-beam evaporation have been explored Three sources of activated oxygen (atomic oxygen from microwave discharge, a plasma generated by electron beams, and an ion beam ) were compared. The best results so far were obtained with atomic oxygen. Epitaxial films with high critics currents were grown -on SrTiO3 and and MgO at 600°C. Evaporation rates were controlled with a tam ~∨ using atomic absorption.
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